Gerald Gerlach, Wolfram Dötzel
Einführung in die Mikrosystemtechnik
Ein Kursbuch für Studierende
Vorwort
6
Inhaltsverzeichnis
8
1 Einführung
14
1.1 Was ist ein Mikrosystem?
17
1.2 Mikroelektronik und Mikrosystemtechnik
21
1.3 Anwendungsfelder und Entwicklungstrends
23
1.4 Beispiel Drehratensensor
24
2 Skalierung und Ähnlichkeit
32
Skalierung
32
Ähnlichkeit und Kennzahlen
38
3 Werkstoffe
44
Übersicht
44
Einkristallines Silizium
48
Beschreibung der Orientierung von Flächen und Ri
49
Oberflächeneigenschaften bei verschiedener Orien
56
Anisotrope elastische Eigenschaften
57
Festigkeit
60
Siliziumscheiben
64
Gläser
68
Allgemeine Eigenschaften von Glas
69
Viskoelastisches Verhalten
70
Gläser in der Mikrosystemtechnik
72
Polymere
74
Thermoplastische Werkstoffe in der Mikrosystemtechnik
75
Allgemeine Eigenschaften
75
Mechanische Eigenschaften
76
Thermoplastische Polymere
76
Fotoresist
78
Negativresiste
79
Positivresiste
79
Dünnschichten
80
Siliziumoxid, Siliziumnitrid
83
Elektrisch leitende Schichten
85
Polysiliziumschichten
85
Materialeigenschaften im Vergleich
86
4 Mikrotechnische Fertigungsverfahren
89
Überblick
89
Reinheit in der Fertigung
95
Reinraumtechnik
96
Ausbeute
97
Reinraum
98
Waferreinigung
100
Lithografie
102
Prinzip
102
Lithografischer Prozess
103
Minimal strukturierbare Linienbreiten
106
Doppelseitenlithografie
107
Lithografie in stark profilierten Strukturen
107
Schichtherstellung
108
Überblick
108
Schichtkonformität
110
Thermische Oxidation
110
Aufdampfen
112
Sputtern
114
Chemische Gasphasenabscheidung
116
Vergleich
118
Schichtstrukturierung
119
Grundlagen
119
Nassätzen
121
Trockenätzen
121
Lift-off-Prozess
124
Anisotropes nasschemisches Tiefenätzen
124
Prinzip
125
Anisotrope Ätzlösungen
126
Ätzraten
127
Ätzstoppverfahren
130
Ätzfiguren
132
Ätzratendiagramme
132
Herausbildung von Ätzfiguren
134
Unterätzung konvexer Ecken
140
Entwurf von Ätzmasken
141
Dotierung
143
Diffusion
143
Diffusionsgesetz
144
Dotierquellen
145
Diffusionsprofil
145
Thermisches Budget
146
Ionenimplantation
147
Dotierungsprofil
147
Strahlenschäden und Ausheilung
149
Anwendung
149
Vergleich der Dotierungsverfahren
149
Verbindungsverfahren
150
Eutektisches Bonden
151
Anodisches Bonden
152
Siliziumdirektbonden
153
Vergleich der Verbindungsverfahren
153
Isolationstechniken
154
SIMOX-Verfahren
155
BESOI-Verfahren
156
Smart-Cut-Verfahren
158
Oberflächenmikromechanik
159
Prinzip
159
Herstellung von Hohlräumen
162
Haften beweglicher Strukturen
165
Haftung durch Flüssigkeitsfilme
165
Vermeidung von haftenden Strukturen
166
Vergleich von Volumen- und Oberflächenmikromecha
168
Oberflächennahe Mikromechanik
168
Prinzip
169
Verfahren
169
a)SCREAM-Prozess
169
b)SIMPLE-Prozess
171
HARMST
172
Begriffsbestimmung
172
LIGA-Verfahren
172
Miniaturisierte klassische Verfahren
174
Mikrospritzgießen
176
Mikroheißprägen
179
Mikrozerspanen
180
Auswahl von mikrotechnischen Fertigungsverfahren
183
BookmarkLevel: 3BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: a)Grundformen und Synthese der GesamtgestaltBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: b)FormbegrenzungBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: c)Auswahl der VerfahrensschritteBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: 5 Aufbau- und VerbindungstechnikBookmarkLevel: 1BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Aufgaben und AnforderungenBookmarkLevel: 2BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: AufgabenBookmarkLevel: 3BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Zuverlässigkeitsgerechtes PackagingBookmarkLevel: 3BookmarkPageNumber: 195BookmarkBeginBookmarkTitle: Funktionen der Aufbau- und VerbindungstechnikBookmarkLevel: 2BookmarkPageNumber: 196BookmarkBeginBookmarkTitle: Mechanische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: SubstratwerkstoffeBookmarkLevel: 4BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: Monolithische versus HybridintegrationBookmarkLevel: 4BookmarkPageNumber: 198BookmarkBeginBookmarkTitle: Thermische AnpassungBookmarkLevel: 4BookmarkPageNumber: 200BookmarkBeginBookmarkTitle: Elektrische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 201BookmarkBeginBookmarkTitle: WärmeabführungBookmarkLevel: 3BookmarkPageNumber: 202BookmarkBeginBookmarkTitle: Verkapselung und GehäusungBookmarkLevel: 3BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: a)BeschichtungenBookmarkLevel: 4BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: b)TrennmembranenBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: c)VerkapselungBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: d)Hermetische AbdichtungBookmarkLevel: 4BookmarkPageNumber: 205BookmarkBeginBookmarkTitle: 6 Funktions- und Formelemente der MikrosystemtechnikBookmarkLevel: 1BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Mechanische ElementeBookmarkLevel: 2BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Empfindlichkeit in NutzrichtungBookmarkLevel: 3BookmarkPageNumber: 213BookmarkBeginBookmarkTitle: QuerempfindlichkeitBookmarkLevel: 3BookmarkPageNumber: 216BookmarkBeginBookmarkTitle: EigenfrequenzBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: DämpfungBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: GüteBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: AmplitudengangBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: Spannung an der EinspannstelleBookmarkLevel: 3BookmarkPageNumber: 220BookmarkBeginBookmarkTitle: Fluidische ElementeBookmarkLevel: 2BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: Kennzahlen und ModellsystemeBookmarkLevel: 3BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: ElementtypenBookmarkLevel: 3BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: Fluidischer WiderstandBookmarkLevel: 4BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: b\)Fluidische KapazitätBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: c\)Fluidische TrägheitBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: Fluidische SchnittstellenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: Entwurf mikrofluidischer Elemente und KomponentenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: a)Entwurf mikrofluidischer ElementeBookmarkLevel: 4BookmarkPageNumber: 233BookmarkBeginBookmarkTitle: b)Entwurf mikrofluidischer KomponentenBookmarkLevel: 4BookmarkPageNumber: 235BookmarkBeginBookmarkTitle: Thermische ElementeBookmarkLevel: 2BookmarkPageNumber: 237BookmarkBeginBookmarkTitle: Thermisch-elektrische AnalogienBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: Grundgleichungen für den WärmetransportBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: ErsatzschaltungenBookmarkLevel: 3BookmarkPageNumber: 243BookmarkBeginBookmarkTitle: 7 Sensoren und AktorenBookmarkLevel: 1BookmarkPageNumber: 251BookmarkBeginBookmarkTitle: Umkehrbare und parametrische WandlerBookmarkLevel: 2BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Parametrische WandlerBookmarkLevel: 3BookmarkPageNumber: 259BookmarkBeginBookmarkTitle: Stationäre umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 261BookmarkBeginBookmarkTitle: Wandler für Sensoren und AktorenBookmarkLevel: 2BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Elektrostatische WandlerBookmarkLevel: 3BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Piezoelektrische WandlerBookmarkLevel: 3BookmarkPageNumber: 270BookmarkBeginBookmarkTitle: Elektrodynamische WandlerBookmarkLevel: 3BookmarkPageNumber: 273BookmarkBeginBookmarkTitle: Thermomechanische WandlerBookmarkLevel: 3BookmarkPageNumber: 279BookmarkBeginBookmarkTitle: a\)Thermische Ausdehnung von FestkörpernBookmarkLevel: 4BookmarkPageNumber: 280BookmarkBeginBookmarkTitle: b)Thermische Ausdehnung von BimaterialienBookmarkLevel: 4BookmarkPageNumber: 282BookmarkBeginBookmarkTitle: c\)Thermische Ausdehnung von Gasen und FlüssigkBookmarkLevel: 4BookmarkPageNumber: 285BookmarkBeginBookmarkTitle: Piezoresistive WandlerBookmarkLevel: 3BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: a)Piezoresistiver EffektBookmarkLevel: 4BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: b)Piezoresistive SensorenBookmarkLevel: 4BookmarkPageNumber: 292BookmarkBeginBookmarkTitle: 8 Entwurf von MikrosystemenBookmarkLevel: 1BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Entwurfsmethoden und WerkzeugeBookmarkLevel: 2BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Systeme mit konzentrierten ParameternBookmarkLevel: 2BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Verhaltensbeschreibung elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Analyse des statischen Verhaltens elektromechaniBookmarkLevel: 3BookmarkPageNumber: 315BookmarkBeginBookmarkTitle: Analyse elektromechanischer Systeme bei harmonischen LastenBookmarkLevel: 3BookmarkPageNumber: 318BookmarkBeginBookmarkTitle: Transiente Analyse elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 322BookmarkBeginBookmarkTitle: Systeme mit verteilten ParameternBookmarkLevel: 2BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Verhaltensbeschreibung mittels analytischer ModelleBookmarkLevel: 3BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Numerische Methoden auf der Basis der Finiten-Elemente-MethodeBookmarkLevel: 3BookmarkPageNumber: 328BookmarkBeginBookmarkTitle: Makromodellierung komplexer Systeme durch OrdnungsreduktionBookmarkLevel: 3BookmarkPageNumber: 330BookmarkBeginBookmarkTitle: 9 Einfluss technologischer Prozesse auf MikrosystemeigenschaftenBookmarkLevel: 1BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Parameterbasierter MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Robuster MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 343BookmarkBeginBookmarkTitle: AnhangBookmarkLevel: 1BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang A Physikalische KonstantenBookmarkLevel: 2BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang B KoordinatentransformationBookmarkLevel: 2BookmarkPageNumber: 353BookmarkBeginBookmarkTitle: B.1 Elastische KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 354BookmarkBeginBookmarkTitle: B.2 Piezoresistive KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 357BookmarkBeginBookmarkTitle: Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-SchichtenBookmarkLevel: 2BookmarkPageNumber: 360BookmarkBeginBookmarkTitle: Anhang D Nomenklatur von DünnschichtprozessenBookmarkLevel: 2BookmarkPageNumber: 362BookmarkBeginBookmarkTitle: Anhang E Haftung bei oberflächen-mikromechaniscBookmarkLevel: 2BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.1 KapillarkräfteBookmarkLevel: 3BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.2 Kritische Länge von BiegefedernBookmarkLevel: 3BookmarkPageNumber: 366BookmarkBeginBookmarkTitle: SymbolverzeichnisBookmarkLevel: 1BookmarkPageNumber: 368BookmarkBeginBookmarkTitle: AbkürzungsverzeichnisBookmarkLevel: 1BookmarkPageNumber: 376BookmarkBeginBookmarkTitle: StichwortverzeichnisBookmarkLevel: 1BookmarkPageNumber: 381BookmarkBeginBookmarkTitle: Mehr eBooks bei www.ciando.comBookmarkLevel: 1BookmarkPageNumber: 0PageMediaBeginPageMediaNumber: 1PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaBeginPageMediaNumber: 2PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 3PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 4PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 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754.126PageLabelBeginPageLabelNewIndex: 1PageLabelStart: 1PageLabelNumStyle: NoNumberPageLabelBeginPageLabelNewIndex: 2PageLabelStart: 1PageLabelNumStyle: DecimalArabicNumeralsTitle: 3446405232Subject:Keywords:Author: installCreator: PDFCreator Professional 4.2.0Producer: GPL Ghostscript 9.52CreationDate: Wed May 5 17:03:43 2021 CESTModDate: Wed May 5 17:03:43 2021 CESTTagged: noUserProperties: noSuspects: noForm: noneJavaScript: noPages: 386Encrypted: noPage size: 595 x 842 pts (A4)Page rot: 0File size: 12306878 bytesOptimized: noPDF version: 1.4
185
a)Grundformen und Synthese der Gesamtgestalt
185
b)Formbegrenzung
185
c)Auswahl der Verfahrensschritte
185
5 Aufbau- und Verbindungstechnik
191
Aufgaben und Anforderungen
191
Aufgaben
191
Zuverlässigkeitsgerechtes Packaging
195
Funktionen der Aufbau- und Verbindungstechnik
196
Mechanische Verbindungen
197
Substratwerkstoffe
197
Monolithische versus Hybridintegration
198
Thermische Anpassung
200
Elektrische Verbindungen
201
Wärmeabführung
202
Verkapselung und Gehäusung
203
a)Beschichtungen
203
b)Trennmembranen
204
c)Verkapselung
204
d)Hermetische Abdichtung
205
6 Funktions- und Formelemente der Mikrosystemtechnik
210
Mechanische Elemente
210
Empfindlichkeit in Nutzrichtung
213
Querempfindlichkeit
216
Eigenfrequenz
217
Dämpfung
217
Güte
219
Amplitudengang
219
Spannung an der Einspannstelle
220
Fluidische Elemente
225
Kennzahlen und Modellsysteme
225
Elementtypen
229
Fluidischer Widerstand
229
b\)Fluidische Kapazität
231
c\)Fluidische Trägheit
231
Fluidische Schnittstellen
232
Entwurf mikrofluidischer Elemente und Komponenten
232
a)Entwurf mikrofluidischer Elemente
233
b)Entwurf mikrofluidischer Komponenten
235
Thermische Elemente
237
Thermisch-elektrische Analogien
238
Grundgleichungen für den Wärmetransport
238
Ersatzschaltungen
243
7 Sensoren und Aktoren
251
Umkehrbare und parametrische Wandler
252
Umkehrbare Wandler
252
Parametrische Wandler
259
Stationäre umkehrbare Wandler
261
Wandler für Sensoren und Aktoren
264
Elektrostatische Wandler
264
Piezoelektrische Wandler
270
Elektrodynamische Wandler
273
Thermomechanische Wandler
279
a\)Thermische Ausdehnung von Festkörpern
280
b)Thermische Ausdehnung von Bimaterialien
282
c\)Thermische Ausdehnung von Gasen und Flüssigk
285
Piezoresistive Wandler
287
a)Piezoresistiver Effekt
287
b)Piezoresistive Sensoren
292
8 Entwurf von Mikrosystemen
307
Entwurfsmethoden und Werkzeuge
307
Systeme mit konzentrierten Parametern
314
Verhaltensbeschreibung elektromechanischer Systeme
314
Analyse des statischen Verhaltens elektromechani
315
Analyse elektromechanischer Systeme bei harmonischen Lasten
318
Transiente Analyse elektromechanischer Systeme
322
Systeme mit verteilten Parametern
325
Verhaltensbeschreibung mittels analytischer Modelle
325
Numerische Methoden auf der Basis der Finiten-Elemente-Methode
328
Makromodellierung komplexer Systeme durch Ordnungsreduktion
330
9 Einfluss technologischer Prozesse auf Mikrosystemeigenschaften
339
Parameterbasierter Mikrosystementwurf
339
Robuster Mikrosystementwurf
343
Anhang
352
Anhang A Physikalische Konstanten
352
Anhang B Koordinatentransformation
353
B.1 Elastische Koeffizienten
354
B.2 Piezoresistive Koeffizienten
357
Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-Schichten
360
Anhang D Nomenklatur von Dünnschichtprozessen
362
Anhang E Haftung bei oberflächen-mikromechanisc
365
E.1 Kapillarkräfte
365
E.2 Kritische Länge von Biegefedern
366
Symbolverzeichnis
368
Abkürzungsverzeichnis
376
Stichwortverzeichnis
381
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