Einführung in die Mikrosystemtechnik

Vorwort

Inhaltsverzeichnis

1 Einführung

1.1 Was ist ein Mikrosystem?

1.2 Mikroelektronik und Mikrosystemtechnik

1.3 Anwendungsfelder und Entwicklungstrends

1.4 Beispiel Drehratensensor

2 Skalierung und Ähnlichkeit

Skalierung

Ähnlichkeit und Kennzahlen

3 Werkstoffe

Übersicht

Einkristallines Silizium

Beschreibung der Orientierung von Flächen und Ri

Oberflächeneigenschaften bei verschiedener Orien

Anisotrope elastische Eigenschaften

Festigkeit

Siliziumscheiben

Gläser

Allgemeine Eigenschaften von Glas

Viskoelastisches Verhalten

Gläser in der Mikrosystemtechnik

Polymere

Thermoplastische Werkstoffe in der Mikrosystemtechnik

Allgemeine Eigenschaften

Mechanische Eigenschaften

Thermoplastische Polymere

Fotoresist

Negativresiste

Positivresiste

Dünnschichten

Siliziumoxid, Siliziumnitrid

Elektrisch leitende Schichten

Polysiliziumschichten

Materialeigenschaften im Vergleich

4 Mikrotechnische Fertigungsverfahren

Überblick

Reinheit in der Fertigung

Reinraumtechnik

Ausbeute

Reinraum

Waferreinigung

Lithografie

Prinzip

Lithografischer Prozess

Minimal strukturierbare Linienbreiten

Doppelseitenlithografie

Lithografie in stark profilierten Strukturen

Schichtherstellung

Überblick

Schichtkonformität

Thermische Oxidation

Aufdampfen

Sputtern

Chemische Gasphasenabscheidung

Vergleich

Schichtstrukturierung

Grundlagen

Nassätzen

Trockenätzen

Lift-off-Prozess

Anisotropes nasschemisches Tiefenätzen

Prinzip

Anisotrope Ätzlösungen

Ätzraten

Ätzstoppverfahren

Ätzfiguren

Ätzratendiagramme

Herausbildung von Ätzfiguren

Unterätzung konvexer Ecken

Entwurf von Ätzmasken

Dotierung

Diffusion

Diffusionsgesetz

Dotierquellen

Diffusionsprofil

Thermisches Budget

Ionenimplantation

Dotierungsprofil

Strahlenschäden und Ausheilung

Anwendung

Vergleich der Dotierungsverfahren

Verbindungsverfahren

Eutektisches Bonden

Anodisches Bonden

Siliziumdirektbonden

Vergleich der Verbindungsverfahren

Isolationstechniken

SIMOX-Verfahren

BESOI-Verfahren

Smart-Cut-Verfahren

Oberflächenmikromechanik

Prinzip

Herstellung von Hohlräumen

Haften beweglicher Strukturen

Haftung durch Flüssigkeitsfilme

Vermeidung von haftenden Strukturen

Vergleich von Volumen- und Oberflächenmikromecha

Oberflächennahe Mikromechanik

Prinzip

Verfahren

a)SCREAM-Prozess

b)SIMPLE-Prozess

HARMST

Begriffsbestimmung

LIGA-Verfahren

Miniaturisierte klassische Verfahren

Mikrospritzgießen

Mikroheißprägen

Mikrozerspanen

Auswahl von mikrotechnischen Fertigungsverfahren

BookmarkLevel: 3BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: a)Grundformen und Synthese der GesamtgestaltBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: b)FormbegrenzungBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: c)Auswahl der VerfahrensschritteBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: 5 Aufbau- und VerbindungstechnikBookmarkLevel: 1BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Aufgaben und AnforderungenBookmarkLevel: 2BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: AufgabenBookmarkLevel: 3BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Zuverlässigkeitsgerechtes PackagingBookmarkLevel: 3BookmarkPageNumber: 195BookmarkBeginBookmarkTitle: Funktionen der Aufbau- und VerbindungstechnikBookmarkLevel: 2BookmarkPageNumber: 196BookmarkBeginBookmarkTitle: Mechanische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: SubstratwerkstoffeBookmarkLevel: 4BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: Monolithische versus HybridintegrationBookmarkLevel: 4BookmarkPageNumber: 198BookmarkBeginBookmarkTitle: Thermische AnpassungBookmarkLevel: 4BookmarkPageNumber: 200BookmarkBeginBookmarkTitle: Elektrische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 201BookmarkBeginBookmarkTitle: WärmeabführungBookmarkLevel: 3BookmarkPageNumber: 202BookmarkBeginBookmarkTitle: Verkapselung und GehäusungBookmarkLevel: 3BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: a)BeschichtungenBookmarkLevel: 4BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: b)TrennmembranenBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: c)VerkapselungBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: d)Hermetische AbdichtungBookmarkLevel: 4BookmarkPageNumber: 205BookmarkBeginBookmarkTitle: 6 Funktions- und Formelemente der MikrosystemtechnikBookmarkLevel: 1BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Mechanische ElementeBookmarkLevel: 2BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Empfindlichkeit in NutzrichtungBookmarkLevel: 3BookmarkPageNumber: 213BookmarkBeginBookmarkTitle: QuerempfindlichkeitBookmarkLevel: 3BookmarkPageNumber: 216BookmarkBeginBookmarkTitle: EigenfrequenzBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: DämpfungBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: GüteBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: AmplitudengangBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: Spannung an der EinspannstelleBookmarkLevel: 3BookmarkPageNumber: 220BookmarkBeginBookmarkTitle: Fluidische ElementeBookmarkLevel: 2BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: Kennzahlen und ModellsystemeBookmarkLevel: 3BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: ElementtypenBookmarkLevel: 3BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: Fluidischer WiderstandBookmarkLevel: 4BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: b\)Fluidische 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1BookmarkPageNumber: 251BookmarkBeginBookmarkTitle: Umkehrbare und parametrische WandlerBookmarkLevel: 2BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Parametrische WandlerBookmarkLevel: 3BookmarkPageNumber: 259BookmarkBeginBookmarkTitle: Stationäre umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 261BookmarkBeginBookmarkTitle: Wandler für Sensoren und AktorenBookmarkLevel: 2BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Elektrostatische WandlerBookmarkLevel: 3BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Piezoelektrische WandlerBookmarkLevel: 3BookmarkPageNumber: 270BookmarkBeginBookmarkTitle: Elektrodynamische WandlerBookmarkLevel: 3BookmarkPageNumber: 273BookmarkBeginBookmarkTitle: Thermomechanische WandlerBookmarkLevel: 3BookmarkPageNumber: 279BookmarkBeginBookmarkTitle: a\)Thermische Ausdehnung von FestkörpernBookmarkLevel: 4BookmarkPageNumber: 280BookmarkBeginBookmarkTitle: b)Thermische Ausdehnung von BimaterialienBookmarkLevel: 4BookmarkPageNumber: 282BookmarkBeginBookmarkTitle: c\)Thermische Ausdehnung von Gasen und FlüssigkBookmarkLevel: 4BookmarkPageNumber: 285BookmarkBeginBookmarkTitle: Piezoresistive WandlerBookmarkLevel: 3BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: a)Piezoresistiver EffektBookmarkLevel: 4BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: b)Piezoresistive SensorenBookmarkLevel: 4BookmarkPageNumber: 292BookmarkBeginBookmarkTitle: 8 Entwurf von MikrosystemenBookmarkLevel: 1BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Entwurfsmethoden und WerkzeugeBookmarkLevel: 2BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Systeme mit konzentrierten ParameternBookmarkLevel: 2BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Verhaltensbeschreibung elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Analyse des statischen Verhaltens elektromechaniBookmarkLevel: 3BookmarkPageNumber: 315BookmarkBeginBookmarkTitle: Analyse elektromechanischer Systeme bei harmonischen LastenBookmarkLevel: 3BookmarkPageNumber: 318BookmarkBeginBookmarkTitle: Transiente Analyse elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 322BookmarkBeginBookmarkTitle: Systeme mit verteilten ParameternBookmarkLevel: 2BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Verhaltensbeschreibung mittels analytischer ModelleBookmarkLevel: 3BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Numerische Methoden auf der Basis der Finiten-Elemente-MethodeBookmarkLevel: 3BookmarkPageNumber: 328BookmarkBeginBookmarkTitle: Makromodellierung komplexer Systeme durch OrdnungsreduktionBookmarkLevel: 3BookmarkPageNumber: 330BookmarkBeginBookmarkTitle: 9 Einfluss technologischer Prozesse auf MikrosystemeigenschaftenBookmarkLevel: 1BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Parameterbasierter MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Robuster MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 343BookmarkBeginBookmarkTitle: AnhangBookmarkLevel: 1BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang A Physikalische KonstantenBookmarkLevel: 2BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang B KoordinatentransformationBookmarkLevel: 2BookmarkPageNumber: 353BookmarkBeginBookmarkTitle: B.1 Elastische KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 354BookmarkBeginBookmarkTitle: B.2 Piezoresistive KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 357BookmarkBeginBookmarkTitle: Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-SchichtenBookmarkLevel: 2BookmarkPageNumber: 360BookmarkBeginBookmarkTitle: Anhang D Nomenklatur von DünnschichtprozessenBookmarkLevel: 2BookmarkPageNumber: 362BookmarkBeginBookmarkTitle: Anhang E Haftung bei oberflächen-mikromechaniscBookmarkLevel: 2BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.1 KapillarkräfteBookmarkLevel: 3BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.2 Kritische Länge von BiegefedernBookmarkLevel: 3BookmarkPageNumber: 366BookmarkBeginBookmarkTitle: SymbolverzeichnisBookmarkLevel: 1BookmarkPageNumber: 368BookmarkBeginBookmarkTitle: AbkürzungsverzeichnisBookmarkLevel: 1BookmarkPageNumber: 376BookmarkBeginBookmarkTitle: StichwortverzeichnisBookmarkLevel: 1BookmarkPageNumber: 381BookmarkBeginBookmarkTitle: Mehr eBooks bei www.ciando.comBookmarkLevel: 1BookmarkPageNumber: 0PageMediaBeginPageMediaNumber: 1PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaBeginPageMediaNumber: 2PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 3PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 4PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 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a)Grundformen und Synthese der Gesamtgestalt

b)Formbegrenzung

c)Auswahl der Verfahrensschritte

5 Aufbau- und Verbindungstechnik

Aufgaben und Anforderungen

Aufgaben

Zuverlässigkeitsgerechtes Packaging

Funktionen der Aufbau- und Verbindungstechnik

Mechanische Verbindungen

Substratwerkstoffe

Monolithische versus Hybridintegration

Thermische Anpassung

Elektrische Verbindungen

Wärmeabführung

Verkapselung und Gehäusung

a)Beschichtungen

b)Trennmembranen

c)Verkapselung

d)Hermetische Abdichtung

6 Funktions- und Formelemente der Mikrosystemtechnik

Mechanische Elemente

Empfindlichkeit in Nutzrichtung

Querempfindlichkeit

Eigenfrequenz

Dämpfung

Güte

Amplitudengang

Spannung an der Einspannstelle

Fluidische Elemente

Kennzahlen und Modellsysteme

Elementtypen

Fluidischer Widerstand

b\)Fluidische Kapazität

c\)Fluidische Trägheit

Fluidische Schnittstellen

Entwurf mikrofluidischer Elemente und Komponenten

a)Entwurf mikrofluidischer Elemente

b)Entwurf mikrofluidischer Komponenten

Thermische Elemente

Thermisch-elektrische Analogien

Grundgleichungen für den Wärmetransport

Ersatzschaltungen

7 Sensoren und Aktoren

Umkehrbare und parametrische Wandler

Umkehrbare Wandler

Parametrische Wandler

Stationäre umkehrbare Wandler

Wandler für Sensoren und Aktoren

Elektrostatische Wandler

Piezoelektrische Wandler

Elektrodynamische Wandler

Thermomechanische Wandler

a\)Thermische Ausdehnung von Festkörpern

b)Thermische Ausdehnung von Bimaterialien

c\)Thermische Ausdehnung von Gasen und Flüssigk

Piezoresistive Wandler

a)Piezoresistiver Effekt

b)Piezoresistive Sensoren

8 Entwurf von Mikrosystemen

Entwurfsmethoden und Werkzeuge

Systeme mit konzentrierten Parametern

Verhaltensbeschreibung elektromechanischer Systeme

Analyse des statischen Verhaltens elektromechani

Analyse elektromechanischer Systeme bei harmonischen Lasten

Transiente Analyse elektromechanischer Systeme

Systeme mit verteilten Parametern

Verhaltensbeschreibung mittels analytischer Modelle

Numerische Methoden auf der Basis der Finiten-Elemente-Methode

Makromodellierung komplexer Systeme durch Ordnungsreduktion

9 Einfluss technologischer Prozesse auf Mikrosystemeigenschaften

Parameterbasierter Mikrosystementwurf

Robuster Mikrosystementwurf

Anhang

Anhang A Physikalische Konstanten

Anhang B Koordinatentransformation

B.1 Elastische Koeffizienten

B.2 Piezoresistive Koeffizienten

Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-Schichten

Anhang D Nomenklatur von Dünnschichtprozessen

Anhang E Haftung bei oberflächen-mikromechanisc

E.1 Kapillarkräfte

E.2 Kritische Länge von Biegefedern

Symbolverzeichnis

Abkürzungsverzeichnis

Stichwortverzeichnis

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